The Cressington 308UHR Ultra High Resolution Coating System is the most advanced coating system available for ultra high resolution SEM/TEM work. The system is specifically designed for the needs of ultra high resolution FESEM and/or TEM imaging. The 308UHR utilizes a specially configured DC magnetron sputter head for amorphous ultra-thin chromium coating for FESEM samples. The high baseline vacuum in the 10-7 mbar range combined with the unique gas handling capabilities of the Cressington 308R vacuum pumping station assures a clean environment for sputtering. Sputtering is done with argon gas in a medium vacuum range in order to achieve excellent ultra high resolution coating results.
The 308UHR also features an electron beam carbon evaporation facility for ultra high quality carbon coatings needed for ultra-structural TEM imaging and EBSD applications. This makes the Cressington 308UHR a truly unique system, combining an ultra high resolution sputter coater with E-Beam evaporation capabilities.
The 308UHR system configuration includes:
308R pumping station with 9xKF40 feedthrough collar and light weight stainless steel chamber
Cryo pump in top of vacuum chamber
DC100 sputter supply and sputter source for amorphous chromium
EB Evaporation system with EB500 E-Beam power supply and carbon E-Beam source
Swing-in shutter assembly
Static shutter
Rotary tilt stage with 105mm dia multi specimen holder
MTM-10 thickness monitor system
The system can be further upgraded with glow
The 308UHR system enables advanced coating techniques such as:
Grain-free ultra-thin conformal amorphous chromium coating for FESEM
Ultra-thin E-beam evaporated carbon support films for TEM
Precision E-beam rotary metal shadowing for molecular biology
Glow discharge pre-coating cleaning of FESEM samples
Ultra-structural freeze drying with UHR sputter coating for FESEM
Accurate ultra-thin E-beam coating for FESEM and EBSD
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